Our Products

ULVAC PRC Series Mechanical Booster Vacuum Pump

The ULVAC PRC Series is a mechanical booster vacuum pump developed for applications requiring a high level of cleanliness, such as semiconductor and LCD manufacturing processes. When used in combination with dry pumps, oil rotary vacuum pumps, or liquid ring vacuum pumps, it significantly increases pumping speed within the pressure range of 10 kPa to 0.1 Pa, where the performance of backing pumps decreases.

Key Features

• Stable performance in the evacuation of water vapor and solvent vapors thanks to its oil-free pumping chamber
• Design that does not require a mechanical seal between the atmosphere and vacuum due to canned motor technology
• Clean and reliable operating principle that eliminates the risk of oil leakage
• High corrosion resistance through special anodized coatings applied to key components
• Structure suitable for clean processes with low particle generation
• Shorter evacuation times with the optional atmospheric pressure start-up feature
• Various capacity options to meet different process requirements

Application Areas

PRC Series mechanical booster pumps are used in a wide range of applications where high vacuum performance and process cleanliness are critical:

• Semiconductor and LCD manufacturing systems
• Evaporation systems
• Sputtering and ion coating processes
• Vacuum drying systems
• Freeze drying applications
• Vacuum degassing systems
• Analytical instruments and leak testing systems
• Gas exchange and gas filling applications
• Vacuum insulation systems
• Heat treatment and melting furnaces
• General industrial vacuum systems

Technical Advantages

The PRC Series offers pumping capacities ranging from 280 m³/h to 1800 m³/h with the PRC-003A, PRC-006A, PRC-012A, and PRC-018A models. Thanks to its corrosion-resistant structure, oil-free pumping technology, and design that complies with high cleanliness standards, it provides a reliable vacuum solution for semiconductor, display technology, and advanced manufacturing processes. When used together with backing pumps, it significantly increases the overall pumping performance of the system, contributing to shorter process times.