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3 Stage Diaphragm Pump

Diaphragm Type Dry Vacuum Pump

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ULVAC DAU-20 High Vacuum Diaphragm Dry Vacuum Pump

The ULVAC DAU-20 is a three-stage diaphragm dry vacuum pump designed for laboratory and industrial applications requiring high vacuum performance. Thanks to its enhanced compression ratio compared to standard diaphragm pumps, it can achieve an ultimate pressure of 200 Pa, making it an ideal backing pump for turbomolecular pumps (TMP).

Its completely oil-free (dry) design ensures that no oil comes into contact with the process gas, eliminating the risk of contamination. The three-stage diaphragm mechanism enables a significantly lower ultimate pressure than conventional single-stage and two-stage diaphragm pumps, providing outstanding performance in analytical instruments and precision vacuum systems.

The DAU-20 can be started directly from atmospheric pressure. Equipped with a built-in automatic resettable thermal protection system, a compact housing, and a simple mechanical design for easy maintenance, it offers a reliable and long-lasting vacuum solution for laboratories, research institutes, and OEM manufacturers.

Key Features

  • Oil-free operating principle
  • Three-stage diaphragm technology
  • Ultimate pressure of 200 Pa
  • Suitable as a backing pump for turbomolecular pumps (TMP)
  • Direct operation from atmospheric pressure
  • Built-in automatic resettable thermal protection
  • Low maintenance requirements
  • Quiet operation with low vibration
  • Compact design
  • Easy integration into laboratory equipment and OEM systems
  • Long service life
  • Simple mechanical construction for easy maintenance

Applications

  • Backing pump for turbomolecular pumps (TMP)
  • Analytical instruments
  • Mass spectrometers
  • Gas analysis systems
  • Biochemical analyzers
  • Vacuum drying systems
  • Evaporation systems
  • Gas filling systems
  • Research and development laboratories
  • OEM vacuum systems


Teknik Özellikler

DAU-20
Pompa Kademesi 3 Kademeli Diyagram
Çalışma Prensibi Yağsız (Dry / Oil-Free)
Pompa Devir Hızı (50 Hz) 20 L/ dk (1,2 m³/h)
Pompa Devir Hızı (60 Hz) 23 L/ dk (1,38 m³/h)
Nihai Basınç (Pa) 200 Pa (0,2 kPa)
Giriş Flanşı Rc 1/8 (Ø10 × Ø6 mm)
Çıkış Flanşı Rc 1/8 (Ø10 × Ø6 mm)
Motor Tipi 220 V Monofaz
Soğutma Tipi Hava Soğutmalı
Çalışma Sıcaklığı 5 – 40 °C
Ağırlık (kg) 7,5 kg
Ölçü (mm) 161 × 327 × 217 mm
DAU-20
Pompa Kademesi
3 Kademeli Diyagram
Çalışma Prensibi
Yağsız (Dry / Oil-Free)
Pompa Devir Hızı (50 Hz)
20 L/ dk (1,2 m³/h)
Pompa Devir Hızı (60 Hz)
23 L/ dk (1,38 m³/h)
Nihai Basınç (Pa)
200 Pa (0,2 kPa)
Giriş Flanşı
Rc 1/8 (Ø10 × Ø6 mm)
Çıkış Flanşı
Rc 1/8 (Ø10 × Ø6 mm)
Motor Tipi
220 V Monofaz
Soğutma Tipi
Hava Soğutmalı
Çalışma Sıcaklığı
5 – 40 °C
Ağırlık (kg)
7,5 kg
Ölçü (mm)
161 × 327 × 217 mm