Our Products

ULVAC DA-60S Single-Stage Diaphragm Dry Vacuum Pump

The ULVAC DA-60S is a single-stage diaphragm dry vacuum pump designed for laboratory and industrial applications requiring high pumping capacity. Its oil-free operating principle prevents process gas contamination, while its 60 L/min pumping speed ensures reliable and efficient performance across a wide range of vacuum applications.

The pump generates vacuum through the reciprocating motion of its diaphragm. Since no oil comes into contact with the process gas, it provides a clean vacuum environment. Its simple mechanical design minimizes maintenance requirements, while the built-in thermal protection system ensures safe and reliable long-term operation.

The DA Series is one of ULVAC's long-established diaphragm vacuum pump families, with the DA-60S representing one of its high-capacity models. Widely used in applications ranging from laboratory equipment to semiconductor manufacturing, the DA-60S is an ideal solution for OEM manufacturers and industrial users thanks to its compact design, high reliability, and outstanding performance.

Key Features

• Oil-free operating principle
• Single-stage diaphragm technology
• High pumping capacity (60 L/min)
• Direct operation from atmospheric pressure
• Built-in thermal protection system
• Low maintenance requirements
• Compact and robust housing
• Designed for continuous operation
• Easy integration into OEM systems
• Quiet operation with low vibration
• Environmentally friendly, RoHS-compliant design

Applications

• Laboratory equipment
• Vacuum systems
• Wafer handling equipment
• Medical devices
• Printing machines
• Automatic packaging systems
• Optical manufacturing equipment
• Semiconductor manufacturing processes
• Injection molding machines
• OEM machine applications