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ULVAC SP1 Pirani Vacuum Gauge

The ULVAC SP1 is a transducer-type Pirani vacuum gauge developed for precise measurement of the low vacuum range in laboratory and industrial vacuum systems. Its compact design integrates the sensor and electronics into a single housing, reducing both cost and panel space requirements. Fully compatible with existing ULVAC WP Series sensor heads, it offers easy sensor replacement and seamless integration into PLC-based automation systems, delivering reliable and efficient vacuum measurement.

Key Features

• Compact transducer design integrating the sensor and electronics into a single housing
• Precise measurement range from 0.4 Pa to 3000 Pa
• Corrosion-resistant platinum (Pt) filament technology
• Fully compatible with WP-01, WP-02, WP-03, and WP-16 sensor heads
• Two independent setpoint outputs
• 0–5 V non-linear analog output
• Easy system integration with a 24 VDC power supply
• Compact design requiring minimal panel space

Application Areas

The SP1 Pirani vacuum gauge is widely used in industrial applications requiring low vacuum measurement and process control:

• Semiconductor manufacturing systems
• Electronic component production lines
• Vacuum coating systems
• Vacuum furnaces
• In-line and multi-chamber production systems
• Automatic vacuum control systems
• Laboratory and research equipment
• General industrial vacuum processes

Technical Advantages

The SP1 delivers reliable vacuum measurement from 0.4 Pa to 3000 Pa (0.004 mbar – 30 mbar). Its compact design, integrating the sensor and electronics into a single housing, saves valuable control panel space, while its full compatibility with existing WP Series sensor heads simplifies maintenance and sensor replacement. With a 24 VDC power supply, 0–5 V analog output, two setpoint outputs, and corrosion-resistant platinum filament technology, it delivers reliable and stable vacuum measurement across a wide range of applications, from laboratories to fully automated industrial production lines.