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Single & Double-Stage Diaphragm Pump

Diaphragm Type Dry Vacuum Pump

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ULVAC DAT Series Single- & Two-Stage Diaphragm Dry Vacuum Pumps (DAT-50D / DAT-100S)

The ULVAC DAT Series consists of high-performance diaphragm dry vacuum pumps developed for laboratory, semiconductor manufacturing, and industrial automation applications. Thanks to their oil-free operating principle, they prevent process gas contamination while providing years of reliable operation through their robust mechanical design and low maintenance requirements.

The DAT Series is available in two configurations to meet different application requirements: the single-stage DAT-100S and the two-stage DAT-50D. The single-stage model delivers a higher pumping speed, while the two-stage model achieves a lower ultimate pressure, providing superior vacuum performance.

Both models can start directly from atmospheric pressure and feature a built-in automatic resettable thermal protection system for safe operation. Their simple diaphragm mechanism makes maintenance quick and easy. With an oil-free pumping chamber, the DAT Series is an ideal choice for laboratory and manufacturing applications requiring a clean, contamination-free vacuum.

Key Features

  • Oil-free operating principle
  • Diaphragm (membrane) technology
  • Available in single-stage and two-stage models
  • Direct operation from atmospheric pressure
  • Built-in automatic resettable thermal protection
  • Simple mechanical design
  • Low maintenance costs
  • Quiet operation with low vibration
  • Easy integration into OEM systems
  • Long service life
  • Designed for both laboratory and industrial applications
  • Environmentally friendly, RoHS-compliant construction

Applications

  • Vacuum systems
  • Wafer handling systems
  • Medical devices
  • Printing machines
  • Automatic packaging machines
  • Optical manufacturing equipment
  • Semiconductor manufacturing facilities
  • Injection molding machines
  • OEM machinery
  • Laboratory equipment


Teknik Özellikler

DAT-50D DAT-100S
Pompa Kademesi Çift Kademeli Diyafram Tek Kademeli Diyafram
Çalışma Prensibi Yağsız (Dry / Oil-Free) Yağsız (Dry / Oil-Free)
Pompa Devir Hızı (50 Hz) 50 L/min (3,0 m³/h) 100 L/min (6,0 m³/h)
Pompa Devir Hızı (60 Hz) 55 L/min (3,3 m³/h) 110 L/min (6,6 m³/h)
Nihai Basınç (Pa) 3,3 kPa 13,3 kPa
Giriş Flanşı Rc 1/4 (Ø12 × Ø8,5 mm) Rc 1/4 (Ø12 × Ø8,5 mm)
Çıkış Flanşı Rc 1/4 (Ø12 × Ø8,5 mm) Rc 1/4 (Ø12 × Ø8,5 mm)
Motor Tipi 220 W Monofaz 220 W Monofaz
Soğutma Tipi Hava Soğutmalı Hava Soğutmalı
Çalışma Sıcaklığı 7–40 °C 7–40 °C
Ağırlık (kg) 11 kg 11 kg
Ölçü (mm) 150 × 232 × 305 mm 150 × 232 × 305 mm
DAT-50D
Pompa Kademesi
Çift Kademeli Diyafram
Çalışma Prensibi
Yağsız (Dry / Oil-Free)
Pompa Devir Hızı (50 Hz)
50 L/min (3,0 m³/h)
Pompa Devir Hızı (60 Hz)
55 L/min (3,3 m³/h)
Nihai Basınç (Pa)
3,3 kPa
Giriş Flanşı
Rc 1/4 (Ø12 × Ø8,5 mm)
Çıkış Flanşı
Rc 1/4 (Ø12 × Ø8,5 mm)
Motor Tipi
220 W Monofaz
Soğutma Tipi
Hava Soğutmalı
Çalışma Sıcaklığı
7–40 °C
Ağırlık (kg)
11 kg
Ölçü (mm)
150 × 232 × 305 mm
DAT-100S
Pompa Kademesi
Tek Kademeli Diyafram
Çalışma Prensibi
Yağsız (Dry / Oil-Free)
Pompa Devir Hızı (50 Hz)
100 L/min (6,0 m³/h)
Pompa Devir Hızı (60 Hz)
110 L/min (6,6 m³/h)
Nihai Basınç (Pa)
13,3 kPa
Giriş Flanşı
Rc 1/4 (Ø12 × Ø8,5 mm)
Çıkış Flanşı
Rc 1/4 (Ø12 × Ø8,5 mm)
Motor Tipi
220 W Monofaz
Soğutma Tipi
Hava Soğutmalı
Çalışma Sıcaklığı
7–40 °C
Ağırlık (kg)
11 kg
Ölçü (mm)
150 × 232 × 305 mm