ULVAC DAT Series Single- & Two-Stage Diaphragm Dry Vacuum Pumps (DAT-50D / DAT-100S)
The ULVAC DAT Series consists of high-performance diaphragm dry vacuum pumps developed for laboratory, semiconductor manufacturing, and industrial automation applications. Thanks to their oil-free operating principle, they prevent process gas contamination while providing years of reliable operation through their robust mechanical design and low maintenance requirements.
The DAT Series is available in two configurations to meet different application requirements: the single-stage DAT-100S and the two-stage DAT-50D. The single-stage model delivers a higher pumping speed, while the two-stage model achieves a lower ultimate pressure, providing superior vacuum performance.
Both models can start directly from atmospheric pressure and feature a built-in automatic resettable thermal protection system for safe operation. Their simple diaphragm mechanism makes maintenance quick and easy. With an oil-free pumping chamber, the DAT Series is an ideal choice for laboratory and manufacturing applications requiring a clean, contamination-free vacuum.
Key Features
- Oil-free operating principle
- Diaphragm (membrane) technology
- Available in single-stage and two-stage models
- Direct operation from atmospheric pressure
- Built-in automatic resettable thermal protection
- Simple mechanical design
- Low maintenance costs
- Quiet operation with low vibration
- Easy integration into OEM systems
- Long service life
- Designed for both laboratory and industrial applications
- Environmentally friendly, RoHS-compliant construction
Applications
- Vacuum systems
- Wafer handling systems
- Medical devices
- Printing machines
- Automatic packaging machines
- Optical manufacturing equipment
- Semiconductor manufacturing facilities
- Injection molding machines
- OEM machinery
- Laboratory equipment