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ULVAC MS Series Screw-Type Dry Vacuum Pump

The ULVAC MS Series is a high-performance screw-type dry vacuum pump developed for demanding process conditions. Based on the conventional LS Series, the MS Series provides reliable operation in applications involving corrosive gases and particle-laden process gases thanks to its enhanced corrosion resistance and superior dust-handling performance.

Key Features

• High corrosion resistance through special surface coatings applied to critical components such as the rotor shaft and cylinder
• Superior dust and particle handling performance enabled by ULVAC’s proprietary rotor design
• Continuous operation capability across the entire pressure range, from atmospheric pressure to ultimate vacuum
• Clean and reliable vacuum environment thanks to its oil-free operating principle
• Low maintenance requirements and long service life

Application Areas

MS Series dry vacuum pumps are preferred in a wide range of industrial applications where process durability is critical:

• Semiconductor and electronic component manufacturing systems
• Etching, Ashing, and Plasma Cleaning processes
• Vacuum heat treatment and sintering furnaces
• Carburizing and special metal processing applications
• Lithium-ion battery manufacturing systems
• Electrode drying, degassing, and electrolyte filling applications
• Freeze drying systems
• Vacuum drying systems
• Medical and food industry applications

Technical Advantages

The MS Series is available in MS120A, MS600A, and MS1200A models, offering a wide pumping capacity range from 115 m³/h to 980 m³/h. With its high process durability, structure optimized for corrosive gases, and powerful particle-handling capability, it provides a reliable vacuum solution for semiconductor, energy, and advanced technology manufacturing processes.