ULVAC UNECS-Portable High-Speed Portable Spectroscopic Ellipsometer
The ULVAC UNECS-Portable is a portable Spectroscopic Ellipsometer developed for the rapid and highly accurate measurement of thin film thickness and optical constants, including the refractive index (n) and extinction coefficient (k).
Thanks to its 2.2 kg measurement unit, the UNECS-Portable can be easily used outside the laboratory. It is an ideal solution for Site Acceptance Tests (SAT) of vacuum systems, large-area sample measurements, and research & development applications. The fixed sample stage can be removed when required, allowing direct measurements on large-sized samples.
The UNECS-Portable utilizes ULVAC's proprietary Snapshot (Single-Shot Measurement) technology, enabling high-speed measurements with a sampling time of only 20 ms. Its compact sensor design, which contains no rotating optical mechanism, eliminates mechanical wear and minimizes periodic maintenance requirements.
Providing high-accuracy measurements of the film thickness, refractive index (n), and extinction coefficient (k) of transparent and semi-transparent thin films, the UNECS-Portable delivers reliable performance for semiconductor manufacturing, optical coatings, universities, R&D laboratories, and on-site verification of vacuum equipment.
Key Features
- Portable design
- Measurement unit weighs only 2.2 kg
- Snapshot (Single-Shot Measurement) technology
- High-speed measurement with 20 ms sampling time
- Measurement of film thickness (D), refractive index (n), and extinction coefficient (k)
- Suitable for transparent and semi-transparent thin films
- Removable fixed sample stage
- Direct measurement capability for large-sized samples
- Maintenance-free optical system without rotating mechanisms
- Compact sensor design
- Windows-based analysis software
- Ideal for both laboratory and field applications
Applications
- Site Acceptance Testing (SAT) of vacuum systems
- Measurement of large-sized samples
- Semiconductor manufacturing
- MEMS manufacturing
- OLED manufacturing
- LCD manufacturing
- Photovoltaics (Solar Cells)
- SiO₂ thin-film measurements
- SiN thin-film measurements
- ITO coating measurements
- Photoresist thickness measurements
- Universities
- Research and Development (R&D) laboratories
- Quality control laboratories
- Vacuum equipment manufacturers
