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ULVAC GR Series Multi-Stage Roots-Type Dry Vacuum Pump

The ULVAC GR Series is a multi-stage Roots-type dry vacuum pump developed for general industrial applications. Based on the engineering experience gained from the LR and HR series, the GR Series delivers efficient vacuum performance in demanding processes thanks to its simple structure and high reliability. It provides stable operation in applications requiring repeated pumping between atmospheric pressure and vacuum, as well as high throughput, thereby improving production efficiency.

Key Features

• Suitable for repeated pumping processes between atmospheric pressure and vacuum with high load capacity
• Optimized structure for load lock chambers requiring high throughput
• Wide voltage-compatible motor system
• Optional explosion-proof motor configuration
• Clean and reliable vacuum environment thanks to its oil-free operating principle
• Low maintenance requirements with a simple and durable design
• Robust mechanical structure optimized for industrial use

Application Areas

GR Series dry vacuum pumps are developed for general industrial vacuum applications and high-load processes:

• Load lock chambers and various coating systems
• Vacuum drying systems
• Vacuum gas exchange and gas filling systems
• Vacuum degassing applications
• General industrial vacuum processes
• Pumping of clean gases such as inert gas and air
• High-cycle atmospheric-vacuum transition systems

Technical Advantages

The GR Series offers a wide pumping capacity range with GR60A, GR90A, and GR180A models. Thanks to its simple design philosophy, it provides cost advantages while delivering reliable performance in industrial production lines with continuous operation under high load conditions. It improves system efficiency by ensuring stable operation, especially in processes involving frequent atmospheric-vacuum cycles.