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Multi-Stage Roots Type Dry Vacuum Pump

Multi-Stage Roots Type Dry Vacuum Pump

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ULVAC RDA Series Multi-Stage Roots Dry Vacuum Pump

The ULVAC RDA Series is an oil-free (dry) multi-stage Roots vacuum pump designed for continuous operation from atmospheric pressure down to high vacuum levels. Its compact design, low maintenance requirements, and excellent water vapor tolerance make it an ideal solution for analytical instruments, helium leak detectors, semiconductor manufacturing processes, and backing applications for turbomolecular pumps.

The pump features a contact-free rotor design with no wear parts inside the pumping chamber, ensuring a long service life. Its oil-free compression mechanism eliminates the risk of process contamination. Thanks to its air-cooled design, which requires no cooling water, and its electronic control system supporting both single-phase and three-phase power supplies, the RDA Series can be easily integrated into a wide range of industrial applications.

Key Features

  • Oil-free (Dry) operating principle
  • Continuous operation from atmospheric pressure to ultimate vacuum
  • Excellent resistance to water vapor
  • Cooling water-free design
  • Supports both single-phase and three-phase power supply
  • Long service life thanks to the contact-free rotor design
  • Low maintenance costs
  • Compact and quiet operation

Applications

  • Helium Leak Detectors
  • Analytical Laboratory Systems
  • Turbomolecular Pump Backing Applications
  • Gas Recovery Systems
  • PVD / CVD Coating Systems
  • Semiconductor Manufacturing
  • Vacuum Process Systems


Teknik Özellikler

RDA-281H RDA-501H
Pompa Devir Hızı 280 L/min (16.8 m³/h) 500 L/min (30 m³/h)
Nihai Basınç (Pa) ≤0.08 Pa (G/B Kapalı) / ≤6 Pa (G/B Açık) ≤0.08 Pa (G/B Kapalı) / ≤6 Pa (G/B Açık)
Motor Tipi 100–115 / 200–240 V (1 Faz) / 200–240 V (3 Faz) 100–115 / 200–240 V (1 Faz) / 200–240 V (3 Faz)
Giriş Flanşı KF25 KF25
Çıkış Flanşı KF25 KF25
Soğutma Tipi Hava Soğutmalı Hava Soğutmalı
Çalışma Sıcaklığı 5–40 °C 5–40 °C
Ağırlık (kg) 38 kg 38 kg
Ölçü (mm) 180 × 520 × 377 mm 180 × 588 × 377 mm
RDA-281H
Pompa Devir Hızı
280 L/min (16.8 m³/h)
Nihai Basınç (Pa)
≤0.08 Pa (G/B Kapalı) / ≤6 Pa (G/B Açık)
Motor Tipi
100–115 / 200–240 V (1 Faz) / 200–240 V (3 Faz)
Giriş Flanşı
KF25
Çıkış Flanşı
KF25
Soğutma Tipi
Hava Soğutmalı
Çalışma Sıcaklığı
5–40 °C
Ağırlık (kg)
38 kg
Ölçü (mm)
180 × 520 × 377 mm
RDA-501H
Pompa Devir Hızı
500 L/min (30 m³/h)
Nihai Basınç (Pa)
≤0.08 Pa (G/B Kapalı) / ≤6 Pa (G/B Açık)
Motor Tipi
100–115 / 200–240 V (1 Faz) / 200–240 V (3 Faz)
Giriş Flanşı
KF25
Çıkış Flanşı
KF25
Soğutma Tipi
Hava Soğutmalı
Çalışma Sıcaklığı
5–40 °C
Ağırlık (kg)
38 kg
Ölçü (mm)
180 × 588 × 377 mm