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ULVAC LS Series Screw-Type Dry Vacuum Pump

The ULVAC LS Series is a screw-type dry vacuum pump developed to provide both high pumping speed and low energy consumption. Thanks to ULVAC’s proprietary screw geometry and ECO-SHOCK energy-saving technology, it delivers high pumping performance in pressure ranges close to atmospheric pressure while minimizing operating costs. With various capacity options, it offers a reliable vacuum solution for many industrial and scientific applications.

Key Features

• Shorter evacuation times thanks to high pumping speed in pressure ranges close to atmospheric pressure
• Low energy consumption with ECO-SHOCK technology
• Clean and reliable vacuum environment thanks to its oil-free operating principle
• Low noise level through the use of an integrated silencer
• Low operating costs due to a design that does not require shaft seal gas
• Continuous operation capability across the entire pressure range
• Various capacity options ranging from 120 m³/h to 1200 m³/h

Application Areas

LS Series dry vacuum pumps are specifically designed for clean processes and light process applications:

C Type (Clean Process)

• Sputtering systems
• Evaporation systems
• Lamination processes
• Load lock chambers
• Backing vacuum applications for turbomolecular pumps

L Type (Light Process)

• Vacuum drying systems
• Freeze drying applications
• Ashing processes
• Processes involving water vapor and volatile chemicals
• General industrial vacuum applications

Technical Advantages

The LS Series offers a wide capacity range with LS120A, LS300A, LS600A, and LS1200A models. With its high pumping speed, low energy consumption, and quiet operation, it provides efficient and reliable performance in semiconductor, thin-film coating, laboratory, and industrial manufacturing applications. The C Type models, specifically developed for clean processes, and the L Type models, designed for light process applications, provide solutions tailored to different process requirements.